[E7]

SPIE Conference on “Laser Applications in Microelectronic and Optoelectronic Manufacturing V”, SPIE Photonics West’2000, San Jose, January 2000; SPIE Proc., Editors: H. Helvajian, K. Sugioka, M.C. Gower and J.J. Dubowski,…

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[E8]

SPIE Conference on “Laser Applications in Microelectronic and Optoelectronic Manufacturing VI”, SPIE Photonics West’2001, San Jose, January 2001; SPIE Proc., Editors:, M.C. Gower, H. Helvajian, K. Sugioka and J.J. Dubowski,…

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[E9]

SPIE Conference on “Photon Processing in Microelectronics and Photonics”, SPIE Photonics West’2002, San Jose, January 2002; SPIE Proc., Editors: K. Sugioka, M.C. Gower, R.F. Haglund, A.Piqué, F. Träger, J.J.…

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[E10]

SPIE Conference on “Photon Processing in Microelectronics and Photonics II”, SPIE Photonics West’2003, San Jose, January 2003; SPIE Proc., Editors: A. Piqué, K. Sugioka, P.R. Herman, J. Fieret, F.G. Bachmann,…

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