Digital Photo-Etching of III-V Semiconductors: Innovative Technology for Nanoscale Device Fabrication (English, French)…
MoreJ.J. Dubowski, S. Aithal, N. Liu, H. Sharma, “Photoluminescence monitored photocorrosion for metrology of GaAs/AlGaAs heterostructures at the nanoscale” [Digital etching of GaAs: a 30-year (almost) perspective], an oral presentation at the Synthesis and Photonics of Nanoscale Materials XIV Symposium, SPIE Photonics West, San Francisco, USA, January 28 – February 2, 2017.
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J.J. Dubowski, S. Aithal, N. Liu, H. Sharma, “Photoluminescence monitored photocorrosion for metrology of GaAs/AlGaAs heterostructures at the nanoscale” [Digital etching of GaAs: a 30-year (almost) perspective], an…
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